Abstract: The principle of dose measurement on IBBe-Device (ion beam bioengineering device) was introduced. The equipment abiding by the rule of backward extraction was developed for measurement of energetic ion implantation rate and dose. It consists of temperature senor, data acquisition unit, data processing software and computer control system. We also analyzed the data of the experiment of ion implantation. At the end of the paper, the improved method of measurement system of IBBe-Device was discussed.